半导体词汇表
半导体词汇表
3D Stacked LSI
3D Stacked LSI
A three-dimensional LSI featuring a stack of IC chips. Some are simply made by stacking chips, like multi-chip package (MCP) and package on package (PoP), while others require making through-silicon vias that are as small as several micrometers in diameter, as in the case of wafer level and chip-on-wafer packaging.